JPS61123542U - - Google Patents
Info
- Publication number
- JPS61123542U JPS61123542U JP756085U JP756085U JPS61123542U JP S61123542 U JPS61123542 U JP S61123542U JP 756085 U JP756085 U JP 756085U JP 756085 U JP756085 U JP 756085U JP S61123542 U JPS61123542 U JP S61123542U
- Authority
- JP
- Japan
- Prior art keywords
- wafer substrate
- substrate storage
- wafer
- cassette
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP756085U JPS61123542U (en]) | 1985-01-21 | 1985-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP756085U JPS61123542U (en]) | 1985-01-21 | 1985-01-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123542U true JPS61123542U (en]) | 1986-08-04 |
Family
ID=30486021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP756085U Pending JPS61123542U (en]) | 1985-01-21 | 1985-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123542U (en]) |
-
1985
- 1985-01-21 JP JP756085U patent/JPS61123542U/ja active Pending